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Items for "RF-MEMS"

Evaluation of Optical Measurement Techniques for the Characterization of Micromechanical Devices

Optical measurement techniques have been evaluated with respect to the characterization of micromechanical devices...

Keywords: MEMS, pressure sensors, yaw rate sensors, RF-MEMS, optical measurement techniques

05/2006 | tm – Technisches Messen, Oldenbourg Wissenschaftsverlag