When the piezoresistive principle was discovered, it was at first only an interesting matter. A market developed only with the first solutions for mounting piezoresistive resistor elements in a way suitable for technical applications...
Keywords: piezoresistive sensors, piezoresistive effect, pressure sensors, packaging
12/2005 | tm Technisches Messen, Oldenbourg WissenschaftsverlagOptical measurement techniques have been evaluated with respect to the characterization of micromechanical devices...
Keywords: MEMS, pressure sensors, yaw rate sensors, RF-MEMS, optical measurement techniques
05/2006 | tm Technisches Messen, Oldenbourg Wissenschaftsverlag