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piezoresistive cantilever arrays
Items for "piezoresistive cantilever arrays"
Scanning Probe Microscopy with Cantilever Arrays
This paper reports on to the realization of piezoresistive cantilever-Arrays used in scanning probe microscopy (SPM)...
Keywords: piezoresistive cantilever arrays, scanning force microscopy, microsystems, nanosystems
09/2006 | tm – Technisches Messen, Oldenbourg Wissenschaftsverlag