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Items for "optical measurement techniques"

Evaluation of Optical Measurement Techniques for the Characterization of Micromechanical Devices

Optical measurement techniques have been evaluated with respect to the characterization of micromechanical devices...

Keywords: MEMS, pressure sensors, yaw rate sensors, RF-MEMS, optical measurement techniques

05/2006 | tm – Technisches Messen, Oldenbourg Wissenschaftsverlag