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Items for "nanopositioning"

Nanopositioning over Large Travel Ranges

Based on the concept of integrated multi-coordinate drives nanopositioning systems for large travel ranges are developed...

Keywords: nanopositioning, multi-coordinate drives, laser interferometer, aerostatic guiding, drive tempering

09/2006 | tm – Technisches Messen, Oldenbourg Wissenschaftsverlag
Materials, Bearings, and Lubricants for Nanopositioning

Most friction models for automatic control are targeted for the macro world, and are of questionable value for the motion control of the nanopositioning and nanomeasuring machine (NPM) system...

Keywords: nanopositioning, bearings, friction, materials, Coatings

09/2006 | tm – Technisches Messen, Oldenbourg Wissenschaftsverlag