Based on the concept of integrated multi-coordinate drives nanopositioning systems for large travel ranges are developed...
Keywords: nanopositioning, multi-coordinate drives, laser interferometer, aerostatic guiding, drive tempering
09/2006 | tm Technisches Messen, Oldenbourg WissenschaftsverlagMost friction models for automatic control are targeted for the macro world, and are of questionable value for the motion control of the nanopositioning and nanomeasuring machine (NPM) system...
Keywords: nanopositioning, bearings, friction, materials, Coatings
09/2006 | tm Technisches Messen, Oldenbourg Wissenschaftsverlag