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Items for "nanometrology"

Analysis of the Measurement Uncertainties of Nanopositioning and Nanomeasuring Machines (NPM-Machines) by Means of a New Vectorial Model Approach

Nanopositioning and Nanomeasuring Machines (NPM-Machines) are pieces of technological equipment that allow positioning, touching and measuring of centimeter-sized objects with nanometer precision...

Keywords: nanometrology, uncertainty of nanopositioning and nanomeasuring machines, vectorial metrological model

09/2006 | tm – Technisches Messen, Oldenbourg Wissenschaftsverlag
Linking up Various Detection Systems for Dimensional Measurements in the Micro- and Nanorange with the Nanomeasuring Machine

The proceeding miniaturization of components in the semiconductor and MEMS industries raises the demands on the accuracy of the measuring instruments applied in quality assurance systems...

Keywords: nanometrology, scanning probe microscopy, profilometer, focus sensor, micro probes

09/2006 | tm – Technisches Messen, Oldenbourg Wissenschaftsverlag
Nanometrology in Two and a Half Dimensions

This paper reports on the development of a Nanometer Coordinate Measuring Machine with atomic force scanning for large-area measurements in 2.5 dimensions...

Keywords: nanometrology, AFM, coordinate metrology, automation, temperature influence

09/2006 | tm – Technisches Messen, Oldenbourg Wissenschaftsverlag