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multi-coordinate drives
Items for "multi-coordinate drives"
Nanopositioning over Large Travel Ranges
Based on the concept of integrated multi-coordinate drives nanopositioning systems for large travel ranges are developed...
Keywords: nanopositioning, multi-coordinate drives, laser interferometer, aerostatic guiding, drive tempering
09/2006 | tm – Technisches Messen, Oldenbourg Wissenschaftsverlag