Items for "micro-/nano force standard"

Shape, Roughness and Force Metrology using Silicon Cantilever Sensors

Piezoresistive cantilever probes were designed for shape and roughness measurements with high-aspect-ratio micro components and as transferable force standards in the nano-to-milli Newton range...

Keywords: cantilever probe, piezoresistive, shape/roughness metrology, micro-/nano force standard