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Items for "micro- and nanotechnology"

New Applications of the Nanomeasuring Machine (NPM-Machine) by Novel Optical and Tactile Probes with Subnanometer Repeatability

This article presents new applications of the nanomeasuring machine developed by the Institute of Process Measurement and Sensor Technology at the Technische Universität Ilmenau...

Keywords: nanomeasuring machine, optical and tactile probes, micro- and nanotechnology

09/2006 | tm – Technisches Messen, Oldenbourg Wissenschaftsverlag