The tremendous development in the field of nanotechnologies results in novel challenges for industry-tailored measurement techniques...
Keywords: nanostructure, metrology, light scattering, roughness, functional surfaces
01/2006 | tm Technisches Messen, Oldenbourg WissenschaftsverlagDue to the availability of modern sensors like micro computer tomographs the point clouds that have to be processed in microsystem technology get increasingly larger...
Keywords: metrology, point cloud, automatic segmentation, geometric primitives
01/2006 | tm Technisches Messen, Oldenbourg WissenschaftsverlagDigital holographic microscopy (DHM) is an imaging technique, which can be applied to the visualisation and metrology of microscopic objects...
Keywords: digital holography, metrology, micro-optics
03/2006 | tm Technisches Messen, Oldenbourg Wissenschaftsverlag