SearchPublisher and Institutes
You are here: Home :: Keyword index :: mat bis NAD :: Mehrschicht-Computertomographie - MEMS technology 
MEMS
Items for "MEMS"
Non-destructive strength characterization of full-wafer-bonds
This article presents a non-destructive test procedure for bond strength characterization. The approach is based on a modified blister test where the length of an artificially generated crack in combination with the applied pressure indicates the bond strength of the composite...
Keywords: MEMS, full-wafer-bonding, strength characterization, non-destructive test procedures
01/2006 | tm – Technisches Messen, Oldenbourg WissenschaftsverlagElectronic Speckle Pattern Interferometry for the Characterization of Microsystem Packages
For the characterization of microsystem packages a highly precise and interaction free measuring technique is needed...
Keywords: MEMS, optical measuring techniques, deformation analysis, ESPI, Thermal expansion
05/2006 | tm – Technisches Messen, Oldenbourg WissenschaftsverlagEvaluation of Optical Measurement Techniques for the Characterization of Micromechanical Devices
Optical measurement techniques have been evaluated with respect to the characterization of micromechanical devices...
Keywords: MEMS, pressure sensors, yaw rate sensors, RF-MEMS, optical measurement techniques
05/2006 | tm – Technisches Messen, Oldenbourg WissenschaftsverlagThermomechanical Loading Setup for the Analysis of Micro Materials Parameter in MEMS Compounds
The reliability of MEMS is influenced strongly by thermomechanical aging and failure mechanisms, acting as the main reason for defects in real applications...
Keywords: MEMS, loading equipment, deformation analysis, reliability, numerical simulation
05/2006 | tm – Technisches Messen, Oldenbourg WissenschaftsverlagDigital Holography Applied to Reflective Microsystems
An interferometer based on the digital holography scheme is presented which can be used to determine the shape and the deformation of reflective MEMS...
Keywords: digital holography, shape, deformation, MEMS, reflective
05/2006 | tm – Technisches Messen, Oldenbourg WissenschaftsverlagMEMS-based Piezoelectric Energy Converter
A new approach of a MEMS (Micro-Electro-Mechanical System) power generator based on a piezoelectric membrane is presented...
Keywords: MEMS, piezoelectric, micromechanical, Membrane, power generator
12/2007 | tm – Technisches Messen, Oldenbourg WissenschaftsverlagAn accurate nonlinear stochastic model for MEMS-based inertial sensor error with wavelet networks
The integration of Global Positioning System (GPS) with Inertial Navigation System (INS) has been widely used in many applications for positioning and orientation purposes...
Keywords: MEMS, INS/GPS, stochastic process, autoregressive (AR), Gauss-Markov (GM), wavelet network
02/2008 | Journal of Applied Geodesy, Walter de GruyterA fuzzy-augmented Kalman filter for IMU/GPS integration
Most of the present techniques for integrating Inertial Measurement Units (IMU) and Global Positioning Systems (GPS) utilize Kalman filtering (KF) as the integration estimation technique. KF is a recursive algorithm designed to compute corrections to a system based on external measurements. In inertial navigation, this can be accomplished by using an external navigation reference such as GPS. As long as GPS measurements are available, the KF solution of IMU/GPS integration works efficiently and provides accurate estimate of the navigation states...
Keywords: MEMS, IMU/GPS, IMU, ANFIS, Takagi-Sugeno systems, Fuzzy logic modeling, Navigation
09/2007 | Journal of Applied Geodesy, Walter de Gruyter