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laser interferometer
Items for "laser interferometer"
Nanopositioning over Large Travel Ranges
Based on the concept of integrated multi-coordinate drives nanopositioning systems for large travel ranges are developed...
Keywords: nanopositioning, multi-coordinate drives, laser interferometer, aerostatic guiding, drive tempering
09/2006 | tm – Technisches Messen, Oldenbourg WissenschaftsverlagUniversal Method for Interferometric Measurements of Lengths and Diameters on CMM
The combined use of a laser interferometer and a coordinate measuring machine (CMM) with an integrated rotary table allows highly-accurate length measurements, possible so far only with special length comparators...
Keywords: coordinate measuring machine, laser interferometer, rotary table, length measurements
01/2007 | tm – Technisches Messen, Oldenbourg Wissenschaftsverlag