You are here: Home :: Area NEM :: Engineering :: Machine construction

K. Hehl, A. Hertzsch, K. Kröger, H. Truckenbrodt

Topography Measurements of Engineering Surfaces with Optical Scatterometry

Profiles of surfaces processed in lathes can be divided into a periodic and a random roughness component. The periodic component is a function of the tool shape and the feed rate. The random part is caused by machine vibrations. The periodic part is the essential global topographic feature to monitor the process. Using an optimized scattering geometry the model–based evaluation leads to an intensified mapping of the microtopographic surface features. The profile parameters measured with the introduced scattering technique agree well with the values obtained by stylus profiling. In most of the cases a simple Kirchhoff approximation can be used. In comparison to a rigorous treatment with a RCWA analysis the results are equal for both methods. Only in the case where near field contributions influence the scattering the more accurate RCWA method must be taken.

tm – Technisches Messen, Oldenbourg Wissenschaftsverlag

Print ISSN: 0171-8096
Volume: 70, 01/2003
Pages: 004

Journal homepage (external site)

Show all available items of this journal

 

Area NEM