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Ralf Reichenbach, Dietrich Schubert, Gerald Gerlach

Surface Micromachined Triaxial Accelerometer

A triaxial accelerometer for automotive applications with open-loop capacitive readout has been designed and prototypes were fabricated with a standard surface micromachining process. The functional principle of the sensor is presented and compared to existing triaxial acceleration sensing solutions. Design and modelling issues and first measurements will be discussed.

tm – Technisches Messen, Oldenbourg Wissenschaftsverlag

Print ISSN: 0171-8096
Volume: 70, 05/2003
Pages: 225

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