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Robert Schmitt, Philip Hafner, Bastian Engelmann

Strategies for the Non-Destructive Characterization of Thin Layers with Scanning Acoustic Microscopy

Keywords: measuring strategies, scanning acoustic microscopy, layer coatings

Scanning Acoustic Microscopy (SAM) enables non-destructive, high-resolution material tests for microsystems by using narrow focussed, high-frequency ultrasonic beams. By means of micro layers new measuring strategies, evaluation methods, and application possibilities are presented.

tm – Technisches Messen, Oldenbourg Wissenschaftsverlag

Print ISSN: 0171-8096
Volume: 74, 06/2007
Pages: 365 - 373

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