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Iwo W. Rangelow, Tzvetan Ivanov, Burkhard E. Volland, Yanko Sarov, Katerina Ivanova, Arun Persaud, Denis Filenko, Denis Dontsov, Nikolay Nikolov, Michael Zier, Bernd Schmidt, Teodor Gotszalk
Scanning Probe Microscopy with Cantilever Arrays
Keywords: piezoresistive cantilever arrays, scanning force microscopy, microsystems, nanosystems
This paper reports on to the realization of piezoresistive cantilever-Arrays used in scanning probe microscopy (SPM). Sensors for the SPM are peculiar microsystems since the combination of physical and microtechnological principles allows to gain an insight into the material science at nanoscale. Moreover SPM technology is opening new horizons in fundamental research and gives a chance to employ new interaction principles for the realization of new sensors and sensor arrays. Physical, biological, and chemical values and interactions can effectively be detected and analyzed using cantilevers, where the nanomechanical interactions can be transformed into an electric signal. The basic issues for the realization of a complete system of self-actuated, piezoresistive cantilever arrays are described.
tm – Technisches Messen, Oldenbourg Wissenschaftsverlag
Print ISSN: 0171-8096
Volume: 73, 09/2006
Pages: 485 - 492