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Gerhard M. Sessler

Novel Polymer and Silicon Sensors in Acoustics

In this paper, new developments in the area of acoustic sensor technology are discussed. This includes novel microphones and other sensors based on cellular piezopolymers. These materials, only known for some years, excel by their high piezoelectric d₃₃-coefficients. For instance, microphones of this kind reach sensitivities of up to 3 mV/Pa and equivalent noise levels of 35 dB(A). Another current research topic to be reported on are acoustic silicon sensors that can be realized with several transduction principles. In particular, capacitive and microoptical microphones will be discussed. The capacitive sensors, now available commercially as silicon condenser microphones, have very good electroacoustic properties with sensitivities around several mV/Pa and equivalent noise levels below 30 dB(A). In spite of their higher noise levels, the microoptical transducers are suitable for some specialized applications.

tm – Technisches Messen, Oldenbourg Wissenschaftsverlag

Print ISSN: 0171-8096
Volume: 71, 04/2004
Pages: 233 - 239

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