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David Stifter, Karin Wiesauer, Rainer Engelke, Gisela Ahrens, Gabi Grützner, Michael Pircher, Erich Götzinger, Christoph K. Hitzenberger

Optical Coherence Tomography as a Novel Tool for Non-Destructive Material Characterization

Keywords: optical coherence tomography, interferometry, non-destructive material characterization

Optical coherence tomography (OCT) provides depth-resolved information on the internal geometry of samples in a contact-free way. We present advanced methods of OCT for applications in materials research and non-destructive sample evaluation. For comparison and demonstration, different OCT setups are used for the imaging of diverse material samples like thick photoresist moulds for the fabrication of micro-electromechanical parts: a standard resolution OCT, a high-speed and high-resolution spectral domain OCT, as well as a ultrahigh-resolution OCT with polarization detection capability.

tm – Technisches Messen, Oldenbourg Wissenschaftsverlag

Print ISSN: 0171-8096
Volume: 74, 02/2007
Pages: 051 - 056

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