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Steffen Hesse, Christoph Schäffel

Nanopositioning over Large Travel Ranges

Keywords: nanopositioning, multi-coordinate drives, laser interferometer, aerostatic guiding, drive tempering

Based on the concept of integrated multi-coordinate drives nanopositioning systems for large travel ranges are developed. Thereby the implementation of a precise position measurement free of Abbé offset is vital. By specific investigations of the functional parts of actuation and guiding, the sources of distortions and the accuracy limiting factors are identified and thereby the crucial points for reducing the positioning uncertainty are localized.

tm – Technisches Messen, Oldenbourg Wissenschaftsverlag

Print ISSN: 0171-8096
Volume: 73, 09/2006
Pages: 493 - 499

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