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Hendrik Rothe, Martin Gruhlke, Ralph Petersen

Nanometrology in Two and a Half Dimensions

Keywords: nanometrology, AFM, coordinate metrology, automation, temperature influence

This paper reports on the development of a Nanometer Coordinate Measuring Machine with atomic force scanning for large-area measurements in 2.5 dimensions. The setup consisting of a positioning system and an atomic force microscope is described and the improvements concerning reduction of uncertainties, reduction of scanning duration, and improvement of usability are presented.

tm – Technisches Messen, Oldenbourg Wissenschaftsverlag

Print ISSN: 0171-8096
Volume: 73, 09/2006
Pages: 511 - 521

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