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Sven Schröder, Angela Duparré, Andreas Tünnermann

Nano-roughness Assessment by Light Scattering Measurement

Keywords: nanostructure, metrology, light scattering, roughness, functional surfaces

The tremendous development in the field of nanotechnologies results in novel challenges for industry-tailored measurement techniques. This in particular holds for methods to determine roughness as well as functional parameters. Light scattering techniques involve major benefits to meet these requirements. The basics and concepts for their adaptation to close-to-process measurement are investigated in the project NanoScatt, part of the DFG priority programme SPP 1159.

tm – Technisches Messen, Oldenbourg Wissenschaftsverlag

Print ISSN: 0171-8096
Volume: 73, 01/2006
Pages: 035 - 042

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