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E. Kallenbach, E. Saffert

Nano-Positioning with Integrated Multi-Coordinate Drives

The paper gives an overview over the planar multi-coordinate drives with electrodynamic force generation that were developed at the Ilmenau Technical University, Faculty of Mechanical Engineering, Institute of Microsystems Technology, Mechatronics and Mechanics and the Institute of Microelectronic and Mechatronic Systems IMMS gGmbH. It discusses based on simulative investigations their potential application within nano-positioning systems.

tm – Technisches Messen, Oldenbourg Wissenschaftsverlag

Print ISSN: 0171-8096
Volume: 67, 07/2000
Pages: 313

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