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Günter Wilkening

Nano Positioning Devices – The Basis of Nano-Metrology

Nano positioning devices are essential means for nano technology, in particular nano metrology. Fields of application are not restricted to displacements in the micrometre range but include also the range up to 100 mm and more. In literature, a number of different displacement methods for the 2D positioning are described some of which are commercially available. Adequate position measuring methods have also been realized.
In the review presented here, various relevant displacement and position measuring methods are summarized in a table. Three examples of positioning devices of different design concepts are explained in more detail.

tm – Technisches Messen, Oldenbourg Wissenschaftsverlag

Print ISSN: 0171-8096
Volume: 67, 07/2000
Pages: 298

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