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J. Trautner, K. Walcher, G. Leuchs, B. Bodermann, H.R. Telle

Multiple-Wavelength Interferometry for Absolute Distance Measurement and Three-Dimensional Imaging

With an absolutely measuring, interferometric distance sensor the three-dimensional shape of objects with rough surfaces is recorded from a large distance. The measuring principle of the sensor is multiple-wavelength interferometry. For the measurement of the interferometric phases the heterodyne detection is used. The distance resolution of the sensor is limited only by the roughness of the surface. The operation of the 3D-image sensor is demonstrated for objects with heights of a few millimeters up to several centimeters measured from a distance of about one meter. With an integration time of 60 ms a distance resolution of a few 10 μm is achieved.

tm – Technisches Messen, Oldenbourg Wissenschaftsverlag

Print ISSN: 0171-8096
Volume: 67, 10/2000
Pages: 406

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