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W. Manthey, K. Wolf, E. Ahl, R. Knöfler, A. Bertz

Micromechanical Scanning Device

A novel sensor-actuator-system applicable to nearly forceless scanning of surfaces is presented. The micromechanical device is characterized by a large vertical positioning range. Resolution in the nm-range is expected to be realized by the evaluation of atomic forces (between measurement tip and sample). Based on the small dimension and the combination (integration) of actuating and sensing elements the system has the potential for an array-configuration with high probe densities.

tm – Technisches Messen, Oldenbourg Wissenschaftsverlag

Print ISSN: 0171-8096
Volume: 67, 04/2000
Pages: 144

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