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Sebastian Bütefisch, Florian Solzbacher, René Ziermann, Peter Krause, Stephanus Büttgenbach, Ralph Wilke, Uwe Brand, Karl Seitz, Roland Roth

Micro Probe for Dimensional Metrology

The development and realization of a three-axial tactile force sensor capable of detecting the three components of an applied force is described. Recent investigations proved that the force sensor can be used as a micro-probe in dimensional metrology. The sensing element consists of a boss membrane fabricated by bulk silicon micro machining. The paper reports on a new design for the sensing elements (piezoresistors) and a new strategy to derive proportional the components of the applied force vector from the three signals.

tm – Technisches Messen, Oldenbourg Wissenschaftsverlag

Print ISSN: 0171-8096
Volume: 70, 05/2003
Pages: 238

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