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Wolfgang Osten, S. Seebacher, Th. Baumbach, Werner Jüptner

The Metrological Basis for the Inspection of Microcomponents by Digital Holography

The characterization of the materials of microcomponents is a very important step for the introduction of new products of microsystems technology. Optical measurement techniques provide important advantages which make them attractive for the investigation of microcomponents. These are the high measurement sensitivity and accuracy, their non-tactile operation and short response potential, the fieldwise working principle, and the high resolution of data. Especially Digital Holography and the related digital measurement techniques (holographic interferometry and contouring) represent an elegant approach to the measurement of 3D-coordinates and displacements of small components. The paper deals with the basics of Digital Holography and describes the metrological requisites of a new generation of measurement systems for the characterization of the materials behavior of microcomponents.

tm – Technisches Messen, Oldenbourg Wissenschaftsverlag

Print ISSN: 0171-8096
Volume: 68, 02/2001
Pages: 68

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