The measurement of small capacitances is affected by the influence of parasitic capacitances. This influence often must be suppressed. Circuits based on different measurement principles which can solve this problem are discussed. They differ in measurement time, expense of circuits, and relevant error mechanisms. Achieved errors and measurement times are documented. For a simple and EMC safe measurement method, simplification of the circuits is shown by discussing the error mechanisms. At the same time the error can be reduced.
Print ISSN: 0171-8096
Volume: 67, 04/2000
Pages: 177