You are here: Home :: Area NEM :: Engineering :: Machine construction

Jürgen Wöllenstein, Harald Böttner

Metal Oxide Gas Sensor Array for Air Quality Monitoring

Two novel silicon-based sensor arrays for on-line air quality monitoring are described, the first one based on films deposited onto bulk silicon wafers and the second one a novel micromachined device for low power consumption.The micromachined version reduces the power consumption from 1.6 W to 0.26 W at 350°C working temperature. The sensing elements (Cr_1.8Ti_0.2O_3+z, ZnO, SnO₂, WO₃, V₂O₅) examined in the arrays include four different metal oxides deposited by thin film technologies. The measured responses in lab and application tests provide patterns which correlate with the air quality and are thus appropriate for an on-line air quality monitoring.

tm – Technisches Messen, Oldenbourg Wissenschaftsverlag

Print ISSN: 0171-8096
Volume: 71, 05/2004
Pages: 305 - 310

Journal homepage (external site)

Show all available items of this journal

 

Area NEM