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D. Vogel, J.-P. Sommer, V. Großer, B. Michel

Measurement of Material Properties on Micro Components

Material properties in microsystems can significantly differ from those of the respective bulk materials. Consequently, the measurement of material properties directly on microscopic components is an important issue. A new hybrid approach is presented which allows to measure material properties on components consisting of different materials. The method includes finite element simulation of the component deformation behavior and is demonstrated for CTE measurement on thin sputtered layers. Furthermore, a new tool for CTE and Poisson ratio measurement on microscopic specimens is introduced.

tm – Technisches Messen, Oldenbourg Wissenschaftsverlag

Print ISSN: 0171-8096
Volume: 68, 02/2001
Pages: 86

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