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Erwin Reichel, Bernhard Weiss, Bernhard Jakoby, Christian Riesch, Franz Keplinger

Measurement of Liquid Properties Using a Vibrating Clamped–Clamped Beam Structure

Keywords: viscosity measurement, resonant fluid sensor

In this contribution the concept of a viscosity and mass density sensor for the liquid phase based on a vibrating clamped-clamped beam structure is investigated. The liquid´s influence on the frequency response is modelled by calculating the resistance force acting on the structure by numerically solving the two-dimensional flow and pressure fields in the cross sectional plane. Besides presenting a micromachined prototype in silicon technology, measurements have been carried out with a PMMA-based sensor element featuring an electromagnetic actuation and an inductive readout. A simple optical method is used to verify the measured frequency response.

tm – Technisches Messen, Oldenbourg Wissenschaftsverlag

Print ISSN: 0171-8096
Volume: 75, 02/2008
Pages: 084 - 090

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