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Yonghe Liu, Juergen A. Schaefer, Gerd Jäger

Materials, Bearings, and Lubricants for Nanopositioning

Keywords: nanopositioning, bearings, friction, materials, Coatings

Most friction models for automatic control are targeted for the macro world, and are of questionable value for the motion control of the nanopositioning and nanomeasuring machine (NPM) system. We present the frictional behaviour of some selected materials, coatings, lubricants, and bearings tested under running conditions similar to a NPM system. Continuous change of surface properties results in various friction characteristics, which substantiate the further development of tribological coatings, particularly for vacuum applications. We emphasize the system engineering approach in developing friction models, which combines fundamental knowledge of surface science, materials science, and its applications in design, construction and automatic control.

tm – Technisches Messen, Oldenbourg Wissenschaftsverlag

Print ISSN: 0171-8096
Volume: 73, 09/2006
Pages: 500 - 510

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