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D. Glüer

Issues for Automation in Semiconductor Manufacturing

This survey sketches the importance of Automatic Control Engineering with all its flavors for state-of-the-art semiconductor manufacturing. Many automation disciplines are required for maximization of production yield, high throughput, low delivery times and little lateness. Tools for accomplishing these goals are hybrid dynamic modeling, advanced simulation and scheduling techniques, complex robustness calculations and comprehensive performance monitoring and justification methods.

at – Automatisierungstechnik, Oldenbourg Wissenschaftsverlag

Print ISSN: 0178-2312
Volume: 50, 01/2002
Pages: 028

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