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A. Nicolaus, G. Bönsch, C.-S. Kang

Interferometric Calibration Procedures of the Step-Width Control of a Phase-Stepping Interferometer

A phase-stepping interferometer designed for dimensional measurements of bodies with parallel, flat measuring surfaces is described. The special Fizeau-algorithm used requires a step-width of exactly ¼ interference order which is achieved by means of piezoactuators with an integrated capacitive sensor. Two interferometric procedures have been developed to calibrate the capacitive sensors. The remaining step-with errors are much below 1 nm.

tm – Technisches Messen, Oldenbourg Wissenschaftsverlag

Print ISSN: 0171-8096
Volume: 67, 07/2000
Pages: 328

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