For the uncertainty estimation for calibrations in the field of dimensional metrology a great number of influence quantities has to be taken into account. By representing process elements and influence quantities in a matrix structure, the contributions to the measurement uncertainty can be systematically identified and discussed. The validation process, necessary for the uncertainty evaluation and the application of some basic principles of dimensional metrology lead to an essential improvement of the measurement.
Print ISSN: 0171-8096
Volume: 72, 05/2005
Pages: 286 - 294