High-grade steel housings with metallic diaphragms and oil filling are presently the only existing long term protective means for piezoresistive sensor elements against aggressive measuring media. The influence of these sensor parts to the transfer function is taken into account in the whole design processes of the differential pressure sensor. This way optimised parameters for the differential pressure sensor are achieved.
Print ISSN: 0171-8096
Volume: 71, 04/2004
Pages: 240 - 248