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Stefan Sindlinger, Christian Wohlgemuth, Roland Werthschützky

Influence of Housing to Design and Manufacturing of Miniaturised Pressure Sensors for Harsh Environments

High-grade steel housings with metallic diaphragms and oil filling are presently the only existing long term protective means for piezoresistive sensor elements against aggressive measuring media. The influence of these sensor parts to the transfer function is taken into account in the whole design processes of the differential pressure sensor. This way optimised parameters for the differential pressure sensor are achieved.

tm – Technisches Messen, Oldenbourg Wissenschaftsverlag

Print ISSN: 0171-8096
Volume: 71, 04/2004
Pages: 240 - 248

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