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Ulrich Kunz, Roland Müller-Fiedler

Evaluation of Optical Measurement Techniques for the Characterization of Micromechanical Devices

Keywords: MEMS, pressure sensors, yaw rate sensors, RF-MEMS, optical measurement techniques

Optical measurement techniques have been evaluated with respect to the characterization of micromechanical devices. A further goal was the monitoring of the long-term behaviour of material parameters. For this purpose we used RF-MEMS.

tm – Technisches Messen, Oldenbourg Wissenschaftsverlag

Print ISSN: 0171-8096
Volume: 73, 05/2006
Pages: 281 - 292

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