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Ulrich Bartsch, Patrick Ruther

Electromechanical Energytransducer Based on SOI-Technology

Keywords: energy harvesting, electromechanical energy transducers, capacitive comb-structures

In this work, the modeling, fabrication, and characterization of electromechanical energy transducers are presented. Both, in the circuit simulation and the experimental verification, the influence of the load resistor and the excitation frequency and amplitude are taken into account. The transducers realized in this study are based on the capacitive comb structures consisting of two fixed comb-electrodes and a counterpart suspended by beam springs. Besides a macromodel, micromechanical resonators were realized to verify the theoretical predictions. The fabrication process is based on silicon-on-insulator-wafers with active silicon layer structured by deep reactive ion etching.

tm – Technisches Messen, Oldenbourg Wissenschaftsverlag

Print ISSN: 0171-8096
Volume: 74, 12/2007
Pages: 636 - 641

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