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Harald Bosse, Günter Wilkening
Dimensional Nanometrology at PTB – a Survey
Keywords: nanotechnology, dimensions, sensor-surface-interactions, measurement standards
Nanotechnology comprises applications based on physical phenomena active in dimensions below 100 nm. The respective measuring tasks in nanotechnology refer to the geometry and other physical and chemical characteristics. A more holistic approach is required as compared with the macroscopic range, since the spatial dimensions play a major role even for physical and chemical properties. This paper focuses on the aspects of physical dimensions.
Metrology institutes are active worldwide in this area. We report on recent work of the PTB. The focus is on measuring systems with high resolutions and large measuring ranges, on the modelling of the sensor-surface-interactions, on apparatuses with combined sensors, and on recent developments of measurement standards.
tm – Technisches Messen, Oldenbourg Wissenschaftsverlag
Print ISSN: 0171-8096
Volume: 73, 01/2006
Pages: 004 - 018