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Claas Falldorf, Christoph von Kopylow, Werner Jüptner

Digital Holography Applied to Reflective Microsystems

Keywords: digital holography, shape, deformation, MEMS, reflective

An interferometer based on the digital holography scheme is presented which can be used to determine the shape and the deformation of reflective MEMS. A geometric model is provided to derive metric data from the measured phase distributions. Thus, the results can be compared to those obtained by numerical simulations.
In order to demonstrate this approach, the shape and the deformation of a micro-system under thermal load were determined and the results are given as an example. Due to the thermal expansion of the loading unit, rigid body motions occur between the corresponding measurements, corrupting the result by a non-negligible systematic error. Therefore, subsequent to the measurement, image processing methods are applied to compensate for these effects. In these regards, the digital holography scheme is shown to be well suited to compensate for the rigid body motions along the optical axis.

tm – Technisches Messen, Oldenbourg Wissenschaftsverlag

Print ISSN: 0171-8096
Volume: 73, 05/2006
Pages: 257 - 265

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