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Christian Depeursinge, Florian Charrière, Frédéric Montfort

Digital Holographic Microscopy for Comparative Metrology in Micro-Optics and MOEMs

Keywords: digital holography, metrology, micro-optics

Digital holographic microscopy (DHM) is an imaging technique, which can be applied to the visualisation and metrology of microscopic objects. It has been established in the frame of the DISCO project that DHM can be considered as an efficient method for direct comparison of the shape or deformations of two objects. “Comparison DHM” allows a straight comparison with a gauge provided by a manufacturer or customer. The phase subtraction between ideal and actual wavefront of the object provides data equivalent to those given by a Twyman–Green or a Mach–Zehnder interferometer.

tm – Technisches Messen, Oldenbourg Wissenschaftsverlag

Print ISSN: 0171-8096
Volume: 73, 03/2006
Pages: 172 - 179

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