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Arne Gräper, Arne Kraft, Jörg Seewig, Eduard Reithmeier

Development of Multifunctional Standards for Optical 3D Microscopy

Keywords: 3D microscopy, calibration, standards, bad values, voids

The need to characterise structured surfaces leads to an increasing usage of optical 3D microscopes in production metrology. In contrast to conventional tactile measurement systems for which suitable norms and test pieces exist the traceability of optically acquired measurement values is complicated. Due to the peculiarities of each system individual errors occur. These can only be characterised by developing and combining individual standards.

tm – Technisches Messen, Oldenbourg Wissenschaftsverlag

Print ISSN: 0171-8096
Volume: 73, 01/2006
Pages: 019 - 025

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