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Thorsten Dziomba, Ludger Koenders, Günter Wilkening, Marcel Flemming, Angela Duparré

Development of a Calibration Guideline for Scanning Probe Microscopes

Not only in research and development, but increasingly also in industrial fabrication smaller and smaller functional structures down to nanometric components are used. As a consequence Scanning Probe Microscopy as a quantitative measurement method and the issue of instrument calibration gather importance. This report summarizes the status quo of the discussions on a future calibration guideline and introduces a possible scheme for the quantitative characterization of SPM systems. Some critical aspects are also discussed by referring to practical examples.

tm – Technisches Messen, Oldenbourg Wissenschaftsverlag

Print ISSN: 0171-8096
Volume: 72, 05/2005
Pages: 295 - 307

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