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Albert Weckenmann, Thomas Wiedenhöfer, Klaus-Dieter Sommer
Determining Measurement Uncertainty in Nanometrology with the example of Nanoclusters
To assign an uncertainty to measurement results in nanotechnology is a new metrological challenge. It is to be recognized that still there is a lack of models and procedures on how to analyze and interpret the tasks and influences. Additionally, the basic mechanisms currently known are insufficiently researched. A possible approach to overcome these problems (deficiencies) is presented with the particular task of measuring Nanoclusters. After gathering and describing the knowledge about the measurement task and relevant parameters, the measurement is mathematically to be modelled and the parameters are to be evaluated by means of probability distributions. Then, based on the GUM procedure, the complete measurement result consisting of an expectation and an associated uncertainty can be calculated. Finally, the uncertainty budget obtained is to be analyzed.
tm – Technisches Messen, Oldenbourg Wissenschaftsverlag
Print ISSN: 0171-8096
Volume: 71, 02/2004
Pages: 093