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Vladimir Hinkov, Markus Körber

New Crystalline Piezo Actuators for Industrial Measurement Applications

Novel crystalline piezo actuators especially suitable for applications in the industrial measurement techniques have been developed and investigated. In the present contribution the optimization of the fabrication technology regarding the thermal domain inversion has been described in detail and future improvements have been proposed as well. Additionally, it has been demonstrated that the novel piezo actuators show the following important features: (i) high linearity; (ii) nearly zero hysteresis; (iii) torsional mode with large bandwidth (above 3 kHz); (iv) high temperature stability and (v) extremely high resolution.

tm – Technisches Messen, Oldenbourg Wissenschaftsverlag

Print ISSN: 0171-8096
Volume: 72, 07/2005
Pages: 476 - 482

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