The use of miniaturized parts or products has been established for many years e.g. in telecommunications or in the automotive industry. Efficent production processes are however still an issue and solutions are in many cases not available yet or are not satisfying. Even metrology based process control shows development potential for optical metrology. The paper presents the development of a fiber-based distance measuring system and its applications.
Print ISSN: 0171-8096
Volume: 70, 02/2003
Pages: 085