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R. Faßler, P. Gussek

Components and Systems for the 3D-Measurement of Microstructures

The paper presents new components for the measurement of 3D-microstructures like a 2-wavelength laser for holography and a structured-illumination projector.

tm – Technisches Messen, Oldenbourg Wissenschaftsverlag

Print ISSN: 0171-8096
Volume: 68, 02/2001
Pages: 94

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