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N. Köpp, B. Liedtke, W. Meier

Components for Structured Illumination and Loading Control of MEMS

The 3D-inspection system for the investigation of material properties of microcomponents contains a module for the measurement of the geometry of microparts. This module is based on the method of structured illumination and uses a flexible and free-programmable LCD-matrix modulator. For the measurement of the material properties under thermal load several system components for precise temperature control and signal amplification were implemented.

tm – Technisches Messen, Oldenbourg Wissenschaftsverlag

Print ISSN: 0171-8096
Volume: 68, 02/2001
Pages: 101

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