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Rolf Krüger-Sehm, Peter Bakucz, Lena Jung, Harald Wilhelms

Chirp Calibration Standards for Surface Measuring Instruments

Keywords: measurement standard, contact stylus instrument, interference microscope, confocal microscope

In this article a chirp-calibration standard is presented. It is intended to test the function transfer of surface measuring instruments by a series of different space scaled frequencies. The standard contains a sequence of sinusoidal waves, the distance, slopes and curvatures of which are well known from the design and the manufacturing process. The surface of the specimen is manufactured by a single diamond turning process. The control data take into account the influence of the cutting tool by morphological operations. First results of measurements on the chirp standard by both a contact stylus instrument and an interference microscope are presented.

tm – Technisches Messen, Oldenbourg Wissenschaftsverlag

Print ISSN: 0171-8096
Volume: 74, 11/2007
Pages: 572 - 576

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