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Gerd Jäger, Eberhard Manske, Tino Hausotte
New Applications of the Nanomeasuring Machine (NPM-Machine) by Novel Optical and Tactile Probes with Subnanometer Repeatability
Keywords: nanomeasuring machine, optical and tactile probes, micro- and nanotechnology
This article presents new applications of the nanomeasuring machine developed by the Institute of Process Measurement and Sensor Technology at the Technische Universität Ilmenau. The new applications to micro- and nanotechnology are based on the development of nanoscale optical and tactile probes used for zero-point indication only. We have realized and tested the following probes: a focal point sensor with a working distance of 10 mm, a white-light interference sensor, a tactile contour sensor and an AFM based on focusprobe. The present work concerns the integration of a tactile 3D-microtouch probe by IBS Netherland into the nanomeasuring machine.
tm – Technisches Messen, Oldenbourg Wissenschaftsverlag
Print ISSN: 0171-8096
Volume: 73, 09/2006
Pages: 457 - 464